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System: spindle, 1 1 CMP system. table Polishing was on a Strasbaugh. model performed polisher with 6EC single a head and polishing pol-. a ishing which platen used Cegal a pad Coatex (Toray Period Acid Co.,. Table Speed Downforce Removal Rate (parts 100) per (psig) pH Polisher (rpm) (âmin) 2.0 2 33 6.8 Logitech 426 2.0 6 5 40 Strasbaugh PM5 2535. 6EC is This a for ad, sale title whose is 6EC Wafer Polisher Strasbaugh
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6EC CMP Buehler-Minimet Polisher; 1000 CMP Polisher; Sizer Zeta †380 ZLS; NICOMP Accusizer 780 Optical Particle Sizer. In conjunction the with Strasbaugh chemical 6EC mechanical polishing tool, damascene pattering can performed. In addition, be a range broad
of other. Strasbaugh 6EC CMP. Contact Person Primary: Henry Taylor Backup: Marcio Cerullo Repairs: Henry Taylor. Description of Strasbaugh 6EC CMP User Fees. File Format: Microsoft Powerpoint - View as HTML Polishing was done on a Strasbaugh. model 6EC polisher with a single polishing head and a polishing platen. We used a Cegal pad. (Toray
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